ULVAC Vacuum Pumps & Systems – Sales, Service & Repair
ULVAC – Japanese High-Tech Vacuum Solutions Since 1952
ULVAC, Inc. (formerly Vacuum Metallurgical Co., Ltd.) is one of the world's leading Japanese manufacturers of vacuum pumps, vacuum systems, and vacuum equipment for high-tech industries. With over 70 years of experience, ULVAC stands for innovation, precision, and reliability in vacuum technology. We are your competent partner for sales, service, and repair of ULVAC vacuum equipment.
🎯 Our ULVAC Product Portfolio:
🌀 Dry Vacuum Pumps – Oil-Free & Low Maintenance
ULVAC is renowned for its advanced dry vacuum pumps that deliver clean, oil-free vacuum without contamination.
💨 Dry Scroll Vacuum Pumps
| Series | Pumping Speed | Ultimate Vacuum | Features |
|---|---|---|---|
| DIS Series | 3 - 20 m³/h | < 0.1 Pa (0.001 mbar) | Compact, quiet, oil-free |
| GLD Series | 3 - 40 m³/h | < 1 Pa (0.01 mbar) | Multi-stage scroll design |
✅ Benefits of Scroll Pumps:
- ✓ 100% oil-free – no contamination
- ✓ Very quiet operation (< 55 dB(A))
- ✓ Low vibration
- ✓ Minimal maintenance
- ✓ Compact design
- ✓ Long service life (> 20,000 hours)
🔄 Dry Multi-Stage Roots Pumps
| Series | Pumping Speed | Ultimate Vacuum | Features |
|---|---|---|---|
| DRU Series | 50 - 500 m³/h | < 0.1 Pa (0.001 mbar) | Multi-stage Roots with screw pump |
| DR Series | 100 - 1,000 m³/h | < 1 Pa (0.01 mbar) | High capacity dry pumps |
✅ Benefits of Dry Roots Pumps:
- ✓ High pumping speed
- ✓ Completely oil-free
- ✓ Can handle corrosive gases
- ✓ Low maintenance
- ✓ Suitable for semiconductor applications
🌪️ Dry Screw Vacuum Pumps
| Parameter | Value |
|---|---|
| Series: | NSS Series |
| Pumping Speed: | 100 - 1,500 m³/h |
| Ultimate Vacuum: | < 0.01 Pa (0.0001 mbar) |
✅ Benefits of Screw Pumps:
- ✓ Very deep ultimate vacuum
- ✓ High chemical resistance
- ✓ Internal compression
- ✓ Energy efficient
- ✓ Ideal for corrosive processes
Applications for Dry Pumps: Semiconductor manufacturing, flat panel display (FPD) production, solar cell manufacturing, LED production, thin film coating, research laboratories, mass spectrometry
🚀 Turbomolecular Pumps – For High & Ultra-High Vacuum
ULVAC offers a comprehensive range of turbomolecular pumps for demanding high vacuum applications.
⚙️ Compound Turbomolecular Pumps
| Series | Pumping Speed | Ultimate Vacuum | Features |
|---|---|---|---|
| TMP-U Series | 50 - 2,000 l/s | < 10⁻⁹ Pa | Hybrid turbomolecular drag pump |
| TG Series | 70 - 300 l/s | < 10⁻⁸ Pa | Compact, magnetically levitated |
✅ Benefits of Turbomolecular Pumps:
- ✓ Ultra-high vacuum capability
- ✓ Clean, oil-free pumping
- ✓ High compression ratios
- ✓ Fast pumping speeds
- ✓ Magnetic bearing options
- ✓ Long maintenance intervals
Applications for Turbo Pumps: Surface analysis (XPS, Auger, SIMS), mass spectrometry, electron microscopy (SEM, TEM), molecular beam epitaxy (MBE), semiconductor process equipment, research vacuum systems
⚙️ Oil-Sealed Rotary Vane Vacuum Pumps
For applications requiring reliable medium vacuum, ULVAC offers proven rotary vane pumps.
| Type | Pumping Speed | Ultimate Vacuum |
|---|---|---|
| Single-Stage (GLD-N Series) | 20 - 300 l/min | 0.1 - 1 Pa (0.001 - 0.01 mbar) |
| Two-Stage (GLD Series) | 20 - 600 l/min | < 0.01 Pa (< 0.0001 mbar) |
✅ Benefits:
- ✓ Proven technology
- ✓ Deep ultimate vacuum
- ✓ Reliable continuous operation
- ✓ Gas ballast for condensates
- ✓ Cost-effective solution
Applications: Freeze drying, vacuum ovens, distillation, degassing, general laboratory use, backing pumps for high vacuum systems
❄️ Cryopumps – Ultra-Clean High Vacuum
ULVAC is a leading manufacturer of cryopumps for ultra-clean high vacuum applications.
| Parameter | Value |
|---|---|
| Series: | CRYO-U Series |
| Pumping Speed: | 1,000 - 20,000 l/s |
| Ultimate Vacuum: | < 10⁻⁹ Pa |
| Cooling: | Helium refrigerator (10-20K) |
✅ Benefits of Cryopumps:
- ✓ Very high pumping speeds
- ✓ Ultra-clean (no oil, no vibration)
- ✓ Excellent for water vapor
- ✓ No maintenance during operation
- ✓ Ideal for semiconductors
Applications: Semiconductor etching, thin film deposition, ion implantation, high-energy physics, space simulation chambers
💧 Roots Booster Pumps
ULVAC offers Roots booster pumps to increase pumping speed in medium vacuum range.
| Parameter | Value |
|---|---|
| Pumping Speed: | 100 - 5,000 m³/h |
| Operating Range: | 0.1 - 100 Pa |
✅ Benefits:
- ✓ 5-10x higher pumping speed
- ✓ Faster evacuation times
- ✓ Improved process efficiency
🏭 Complete Vacuum Systems & Custom Solutions
ULVAC specializes in turnkey vacuum systems for specific applications:
- Coating Systems: PVD, CVD, sputtering, evaporation
- Freeze Dryers: Pharmaceutical and food lyophilization
- Vacuum Furnaces: Heat treatment, sintering, brazing
- Load Lock Systems: For semiconductor manufacturing
- Vacuum Chambers: Custom-designed vessels
- Process Control: Automated vacuum control systems
Available ULVAC models and types: DIS series, GLD series, DRU series, DR series, NSS series, TMP-U series, TG series, GLD-N series, CRYO-U series, dry scroll pumps, dry Roots pumps, dry screw pumps, turbomolecular pumps, compound turbo pumps, magnetic bearing turbo pumps, rotary vane pumps, oil-sealed pumps, two-stage pumps, single-stage pumps, cryopumps, Roots boosters, vacuum systems, coating systems, freeze dryers, semiconductor equipment, high vacuum pumps, ultra-high vacuum pumps, oil-free pumps
🔧 Our Service Capabilities for ULVAC:
| 🛒 Sales | Complete ULVAC product range – pumps, systems, accessories |
| 🔧 Service & Maintenance | Professional servicing according to manufacturer specifications |
| ⚙️ Repair | Expert repair of all ULVAC pump types |
| ♻️ Complete Overhaul | Full reconditioning to factory standards |
| 📦 Spare Parts | Original ULVAC spare parts in stock |
| 🚗 On-Site Service | Installation, commissioning, troubleshooting at your location |
| 🔍 Diagnostics | Performance testing, leak detection, system analysis |
| 💡 Technical Support | Application engineering, system optimization |
🏭 Primary Application Areas:
| Industry | Applications |
|---|---|
| 🔬 Semiconductor | Etching, CVD, PVD, ion implantation, lithography, wafer processing |
| 📺 Flat Panel Display (FPD) | LCD manufacturing, OLED production, touch panel coating |
| ☀️ Solar Cells | Thin film deposition, crystalline silicon processing |
| 💡 LED Manufacturing | MOCVD, epitaxial growth, packaging |
| 🎨 Vacuum Coating | Optical coatings, decorative coatings, functional films |
| 💊 Pharmaceutical | Freeze drying, lyophilization, vacuum drying, API production |
| 🔬 Research & Development | Universities, research institutes, analytical laboratories |
| 🔬 Surface Analysis | XPS, Auger, SIMS, mass spectrometry, electron microscopy |
| 🔥 Metallurgy | Vacuum furnaces, melting, sintering, heat treatment |
| 🔌 Electronics | Component manufacturing, vacuum soldering, packaging |
🌟 Why Choose ULVAC?
| 🇯🇵 Since 1952 | Over 70 years of Japanese vacuum technology expertise |
| 🏆 Technology Leader | World's leading supplier to semiconductor industry |
| 🔬 Innovation | Continuous development of cutting-edge vacuum solutions |
| 🌐 Global Presence | Operations in 30+ countries worldwide |
| 💼 Complete Solutions | From individual pumps to complete turnkey systems |
| 🏭 Industry Specialist | Deep expertise in semiconductor and high-tech industries |
| 🛡️ Quality & Reliability | Japanese precision and quality standards |
| 🔧 Service Network | Global service and support infrastructure |
🔬 ULVAC Technology Highlights:
💡 Key Innovations:
- ✓ Dry Pump Technology – Pioneer in oil-free vacuum pumps for semiconductors
- ✓ Magnetic Bearing Turbo Pumps – Contact-free, maintenance-free operation
- ✓ Compound Molecular Pumps – Combined turbo and drag stages for optimal performance
- ✓ Multi-Stage Dry Roots – High pumping speed with deep vacuum
- ✓ Advanced Cryopumps – Ultra-clean high vacuum for critical processes
- ✓ Intelligent Controllers – Smart vacuum control and monitoring
- ✓ Corrosion-Resistant Designs – For aggressive chemical processes
📊 ULVAC Product Selection Guide:
✅ Choose Dry Scroll Pumps When:
- Oil-free vacuum required
- Clean applications (laboratory, analytical)
- Low maintenance desired
- Quiet operation important
- Vacuum down to 0.1 Pa sufficient
✅ Choose Dry Roots/Screw Pumps When:
- High pumping speeds needed
- Corrosive gases present
- Semiconductor processes
- Deep vacuum < 0.01 Pa required
- Process gas recovery needed
✅ Choose Turbomolecular Pumps When:
- Ultra-high vacuum (< 10⁻⁸ Pa) needed
- Clean, hydrocarbon-free vacuum essential
- Surface analysis applications
- High vacuum coating
- Research applications
✅ Choose Cryopumps When:
- Very high pumping speeds required
- Ultra-clean environment critical
- Semiconductor manufacturing
- Water vapor pumping essential
- Vibration-free operation needed
✅ Choose Rotary Vane Pumps When:
- Cost-effective solution desired
- Medium vacuum sufficient
- General laboratory use
- Backing pump for high vacuum
- Proven, reliable technology preferred
🔧 ULVAC Maintenance & Support:
📅 Preventive Maintenance Programs:
- ✓ Regular inspection schedules
- ✓ Predictive maintenance based on operating hours
- ✓ Performance monitoring and diagnostics
- ✓ Preventive parts replacement
- ✓ System optimization
- ✓ Documentation and reporting
🔧 Common Service Tasks:
| Pump Type | Typical Maintenance |
|---|---|
| Dry Scroll Pumps | Scroll element replacement, bearing check, seal inspection |
| Dry Roots Pumps | Rotor clearance adjustment, seal replacement, gear oil change |
| Turbo Pumps | Bearing replacement, rotor cleaning, controller service |
| Cryopumps | Regeneration, compressor service, temperature sensor check |
| Rotary Vane Pumps | Oil change, vane replacement, seal kit installation |
📈 Industries Served by ULVAC:
ULVAC is the preferred vacuum technology partner for world-leading companies in:
- 🔬 Intel, Samsung, TSMC – Semiconductor manufacturing
- 📺 LG Display, BOE, Samsung Display – FPD production
- ☀️ First Solar, Canadian Solar – Photovoltaic manufacturing
- 💡 Nichia, Cree, Osram – LED production
- 🔬 Universities & Research Institutes – Worldwide
- 💊 Pharmaceutical Companies – Freeze drying applications
Need ULVAC Vacuum Technology?
Whether dry scroll pump for clean laboratory applications, turbomolecular pump for surface analysis, dry Roots pump for semiconductor processing, cryopump for ultra-clean high vacuum, or complete vacuum system – our ULVAC experts are happy to advise you in selecting the optimal vacuum solution for your specific high-tech requirements.
We also offer professional service and complete overhaul for all ULVAC pump types – restoring performance to factory specifications with genuine ULVAC parts and expert knowledge.
Japanese precision and quality since 1952 – professional local service! Contact us today for expert consultation and cutting-edge vacuum technology solutions.