Leybold RUVAC Roots Vacuum Pumps - High-Performance Rotary Lobe Pumps for Industrial Applications
Leybold RUVAC Roots Vacuum Pumps - High-Performance Rotary Lobe Pumps
Leybold RUVAC Roots Vacuum Pumps (rotary lobe pumps) are high-performance vacuum pumps for industrial applications with highest pumping speeds of 100-20,000 m³/h. In combination with backing pumps, they achieve an ultimate vacuum below 0.001 mbar (10⁻³ mbar). The RUVAC family includes the proven series WAU, WH, WS, and WSU - specially developed for coating technology, metallurgy, and demanding vacuum processes.
Leybold RUVAC Roots Pump Product Range:
1. RUVAC WAU - Compact Roots Pumps with Integrated Motor
- 9 models: WAU 101 to WAU 2001
- Pumping Speed: 100-2,050 m³/h
- Pressure Differential: up to 50 mbar
- Design: Compact with integrated motor
- Power: 1.5-15 kW
- Ideal for: Space-saving installation, medium applications
2. RUVAC WH - Horizontal Roots Pumps (Standard)
- 15 models: WH 250 to WH 20000
- Pumping Speed: 250-20,000 m³/h
- Pressure Differential: up to 53 mbar
- Design: Horizontal, separate coupling
- Power: 3-110 kW
- Ideal for: Large industrial plants, coating
3. RUVAC WS - Vertical Roots Pumps (Space-Saving)
- 15 models: WS 250 to WS 20000
- Pumping Speed: 250-20,000 m³/h
- Pressure Differential: up to 53 mbar
- Design: Vertical, minimal footprint
- Power: 3-110 kW
- Advantage: Up to 50% less space requirement than horizontal
4. RUVAC WSU - Vertical Roots Pumps with Integrated Motor
- 8 models: WSU 251 to WSU 2001
- Pumping Speed: 255-2,050 m³/h
- Pressure Differential: up to 50 mbar
- Design: Vertical compact with integrated motor
- Power: 3-15 kW
- Ideal for: Maximum space savings with medium performance
RUVAC WAU 101, RUVAC WAU 251, RUVAC WAU 501, RUVAC WAU 1001, RUVAC WAU 1501, RUVAC WAU 2001, RUVAC WH 250, RUVAC WH 500, RUVAC WH 700, RUVAC WH 1000, RUVAC WH 1500, RUVAC WH 2500, RUVAC WH 3500, RUVAC WH 5000, RUVAC WH 7000, RUVAC WH 9000, RUVAC WH 12000, RUVAC WH 15000, RUVAC WH 18000, RUVAC WH 20000, RUVAC WS 250, RUVAC WS 500, RUVAC WS 700, RUVAC WS 1000, RUVAC WS 1500, RUVAC WS 2500, RUVAC WS 3500, RUVAC WS 5000, RUVAC WS 7000, RUVAC WS 9000, RUVAC WS 12000, RUVAC WS 15000, RUVAC WS 18000, RUVAC WS 20000, RUVAC WSU 251, RUVAC WSU 501, RUVAC WSU 1001, RUVAC WSU 1501, RUVAC WSU 2001
Operating Principle of RUVAC Roots Pumps:
RUVAC Roots pumps (rotary lobe pumps) work with two figure-eight-shaped rotors that rotate contact-free against each other in the housing. Synchronization occurs via an external gear drive outside the pumping chamber. Gas is transported but not compressed (displacement principle) from inlet to outlet. The actual compression is performed by a downstream backing pump (rotary vane, screw, or claw pump).
Technical Advantages of RUVAC Roots Pumps:
- ✓ Very High Pumping Speed - up to 20,000 m³/h per pump
- ✓ 100% Oil-Free - no process contamination
- ✓ Dry Running - no operating fluids in pumping chamber
- ✓ Contact-Free Operation - minimal wear, long service life
- ✓ High Vacuum Range - effective from 10 mbar to
- ✓ Fast Evacuation - extremely short pumping times
- ✓ Low Maintenance - long maintenance intervals
- ✓ Energy Efficient - high efficiency
- ✓ Versatile Designs - horizontal, vertical, compact
- ✓ Multi-Stage Capable - multiple pumps can be cascaded
- ✓ Robust Construction - for industrial continuous operation
RUVAC Roots Pumps in Combination with Backing Pumps:
RUVAC Roots pumps always work in combination with a backing pump, as they cannot pump directly against atmospheric pressure. Typical combinations:
| Backing Pump Type | Ultimate Vacuum (System) | Advantages | Typical Application |
|---|---|---|---|
| SOGEVAC (single-stage) | 0.01-0.1 mbar | Economical, proven | Coating, metallurgy |
| TRIVAC (two-stage) | 0.0001-0.001 mbar | Deep ultimate vacuum | High vacuum coating |
| Claw Pump | 1-10 mbar | Oil-free, robust | Chemistry, pharma |
| Screw Pump | 0.001-0.01 mbar | Oil-free, chemical resistant | Semiconductor, coating |
| Multi-Stage (Roots Cascade) | Highest vacuumUltra-high vacuum precursor |
Main Application Areas:
- Coating Technology: PVD, CVD, sputtering, evaporation, cathode sputtering, inline systems
- Metallurgy: Vacuum melting, vacuum casting, degassing, ESR, VAR processes
- Semiconductor Industry: Wafer manufacturing, etching, CVD, PECVD, implantation
- Solar Technology: Production of solar cells, thin-film modules, CIGS
- Architectural Glass: Coating of facade glass, low-E glass
- Display Manufacturing: LCD, OLED, touchscreen coating
- Automotive Industry: Headlight coating, decorative coating
- Tool Coating: TiN, TiAlN, DLC coatings
- Optical Coating: Lenses, mirrors, anti-reflection coatings
- Vacuum Furnaces: Heat treatment, sintering, brazing, hardening
- Chemical Industry: Distillation, polymerization, drying
- Research & Development: High vacuum chambers, materials research
- Cryogenics: Evacuation of cryostats and superconductors
RUVAC Design Types - Which is Right?
| Series | Design | Motor | Space Requirement | Application |
|---|---|---|---|---|
| WAU | Compact | Integrated | ✓ Low | Small/medium systems |
| WH | Horizontal | Separately coupled | ○ Medium (floor area) | Large industrial plants |
| WS | Vertical | Separately coupled | ✓✓ Very low | Limited space |
| WSU | Vertical compact | Integrated | ✓✓ Minimal | Maximum space savings |
Multi-Stage Roots Systems:
For deepest vacuum ranges, multiple RUVAC Roots pumps can be connected in cascade (series):
- Single-Stage: Roots + Backing Pump → 0.001-0.01 mbar
- Two-Stage: Roots + Roots + Backing Pump → 0.0001-0.001 mbar
- Three-Stage: Roots + Roots + Roots + Backing Pump →
- Advantage: Extremely high total pumping speed even in high vacuum
Typical RUVAC Pump Sets (Examples):
Medium Coating System:
- RUVAC WS 1001 (1,000 m³/h) + SOGEVAC SV 300 B (240 m³/h)
- Ultimate Vacuum: approx. 0.01 mbar
- Application: PVD coating, sputtering
Large Inline Coating:
- 2x RUVAC WH 4200 (4,200 m³/h) + 2x SOGEVAC SV 750 BF (755 m³/h)
- Total Pumping Speed: 8,400 m³/h
- Application: Architectural glass, solar
High Vacuum Laboratory:
- RUVAC WAU 251 (255 m³/h) + TRIVAC D 25 E (23 m³/h)
- Ultimate Vacuum: approx. 0.0005 mbar
- Application: Research, analytics
Operating Parameters and Maintenance:
- Bearings: Lifetime-lubricated rolling bearings
- Gearbox: Oil-lubricated gears (outside pumping chamber)
- Gearbox Oil Change: Approx. 8,000-16,000 operating hours
- Ambient Temperature: +5°C to +40°C
- Max. Pressure Differential: 50-53 mbar (model dependent)
- Noise Level: Approx. 65-85 dB(A) depending on size
- Cooling: Air-cooled (standard), water cooling optional
Our Complete Service for RUVAC Roots Pumps:
- ✓ Sales: New RUVAC pumps of all series (WAU, WH, WS, WSU)
- ✓ System Design: Optimal combination of Roots and backing pump
- ✓ Spare Parts: Rotors, gears, bearings, seals, shaft seals in stock
- ✓ Gearbox Oils: Original Leybold special oils
- ✓ Accessories: Silencers, valves, pressure switches, controls
- ✓ Maintenance: Regular inspections and gearbox oil changes
- ✓ Repair & Overhaul: Professional general overhaul of all RUVAC models
- ✓ Exchange Service: Minimal downtime through rental units
- ✓ On-Site Service: Installation, commissioning, troubleshooting
- ✓ Complete Systems: Vacuum pump sets with control and monitoring
Selection Guide - Important Questions:
- What chamber volume? (liters or m³)
- What ultimate vacuum is required? (mbar absolute)
- What pumping time is desired? (seconds/minutes to process pressure)
- Are there gas loads? (outgassing, process gases, sputter gas)
- What backing pump? (Existing or new, oil-free/oil-lubricated)
- Space constraints: Horizontal or vertical preferred?
- Operating mode: Continuous or cyclic?
- Budget: New unit or reconditioned?
Why Leybold RUVAC Roots Vacuum Pumps?
- ✓ World market leader in Roots technology for over 100 years
- ✓ RUVAC - industry standard in coating technology
- ✓ Tens of thousands of pumps in use worldwide
- ✓ Highest reliability and service life
- ✓ Most comprehensive product range (100-20,000 m³/h)
- ✓ Versatile designs for any space requirement
- ✓ Worldwide availability of spare parts
- ✓ Excellent service and support